针对空间类高性能精密传动部件，对其结构微型化和功能集成化的需求越来越高，这样就需要传动机构的外型尺寸更紧凑，结构更复杂的微型器件和系统，传统传动方式都无法满足其需求。而基于压电陶瓷驱动的传动定位系统具有高的功率密度和功能集成度、高动态响应、高分辨率、大驱动力等优点，被普遍应用于纳米级精密传动与驱动的研究。然而对于压电驱动的纳米定位系统而言，其有限的微米级的最大传动位移量只能达到，一般只能实现微米级(直线)／毫弧度级(旋转)的运动范围。从而造成在有限的工作空间中，常规的纳米定位技术很难实现大尺度回转精密定位。针对以上的问题，本论文以压电陶瓷驱动为基础，针对其中的柔顺位移放大机构、旋转柔顺微传动机构设计，同时结合粘滑驱动原理，引入前馈和反馈控制器相结合的控制策略，为实现大尺度亚微弧度级精密定位平台进行了一系列研究。 本论文根据柔顺传动机构的特点，对柔顺传动设计准则、柔顺机构构型设计、柔顺机构刚度特性分析方法、柔顺结构精度特性分析等问题进行了深入研究，掌握了柔顺微传动机构的理论分析方法。并通过柔顺传动的数学模型的建立和分析，形成了精密柔顺导向微驱动定位装置设计准则与优化设计流程。具体研究如下：开展了一种新型压电驱动混合式微传动放大机构的总体方案设计，运动学，静、动力学分析及优化设计，以及有限元分析与对比。在开展理论分析研究的基础上，完成了实验样机的构型设计与制造，通过搭建样机实验装置，对机构的位移、带宽，定位精度和闭环分辨率进行了实验研究，实验表明该柔顺放大机构能够实现214μm的运动行程及运动分辨率优于8 nm，并保证其一阶谐振频率为204 Hz，在负载0-1000g的外部载荷下，能够将平台输出端和输入端的耦合位移及偏摆误差抑制在0.78μm和95μrad以内，充分证明了机构设计和分析方法的有效性。通过以上理论和实验研究，基本掌握了压电驱动精密柔顺微传动机构的设计与理论分析方法。 针对亚微弧度级旋转精密定位的需求，设计了基于单压电陶瓷驱动的精密柔顺旋转微传动机构，总结了柔顺驱动特性分析与综合设计的阶段性研究结果。在开展理论分析研究的基础上，完成了机构的构型设计，运动学、静力学和动力学的数学模型的建立，有限元的分析，以及样机的研制，通过搭建多个样机实验装置，对其位移、带宽和回转精度进行了实验研究，保证该传动机构在保证最大回转位移为1.64 mrad的同时其回转中心最大漂移小于0.3μm，一阶谐振频率为430 Hz，其闭环转动分辨率优于0.2μrad，验证了构型设计和分析方法的有效性，完成了单压电驱动亚微弧度级旋转微传动平台的性能需求和样机实现。创新性低耦合旋转位移输出和单压电驱动的设计，是本论文内容的创新点之一。该精密微传动平台可实现亚微弧度量级分辨率和高动态特性的角运动。 针对大尺度精密回转定位的需求，将压电驱动与粘滑驱动机理相结合，设计了一种新颖的大尺度亚微弧度级旋转定位平台。该平台可以实现360°无限制的回转定位，同时保证亚微弧度级的定位精度。并创新性的设计一种摩擦力可调的微夹持旋转滑块，使其可以根据负载的变化主动调节摩擦力。此外，它具有紧凑的尺寸，允许其在有限的空间内完成大尺度的精密定位。 针对压电驱动系统本身固有的迟滞非线性，低阻尼系统和非最小相位系统等特性，以及在实现基于粘滑驱动的压电微动台跟踪周期性锯齿波时出现的相位滞后和低工作带宽等一系列问题，进行系统的模型辨识和优化控制。对于迟滞非线性，采用遗传算法对基于Bouc-Wen模型的非线性模型进行辨识，最终获得迟滞逆模型参数；利用频域辨识方法准确获得系统线性环节模型参数。选用改进型零相位前馈消除相位误差，提高压电驱动精密定位平台的跟踪性能。引入一种延迟位置反馈控制器来增加平台的阻尼，减小平台实际运行中产生的振荡，并提高了系统带宽。保证大尺度亚微弧度级回转定位平台样机的可靠性能。 关键词：大尺度 纳米定位平台 压电驱动 粘滑驱动 柔顺放大机构 旋转精密定位Bout-wen迟滞模型 高带宽反馈控制

 For space-based high-performance precision transmission components, the need for miniaturization and functional integration of their structures is increasing, which requires more compact components and more complex micro-devices and systems. The traditional transmission method can not meet its needs. The piezoelectric ceramic-driven transmission positioning system has the advantages of high power density and functional integration, high dynamic response, high resolution, large driving force, etc. Currently, research on nano-scale precision transmission and drive has been widely applied. However, for a piezoelectric drive-based nanopositioning system, its maximum transmission displacement can only reach one thousandth of its own size, and usually only achieve the micrometer/milliradial range of motion. This makes it difficult for traditional nanopositioning technology to achieve large-scale rotary precision transmission and operation in a limited space. In view of the above problems, this thesis is based on the piezoelectric ceramic drive, and the design of the compliant variable displacement amplifying mechanism and the rotary compliant micro-transmission mechanism, combined with the stick-slip drive principle, introduces a combination of feedforward and feedback controllers. A series of studies have been carried out to realize the large-scale submicroradial precision positioning platform. Firstly, based on the characteristics of the compliant transmission mechanism, this paper has carried out in-depth research on the design criteria of the compliant transmission, the design of the compliant mechanism, the analysis method of the stiffness characteristics of the compliant mechanism, and the analysis of the accuracy characteristics of the compliant structure, and comprehensively grasped the compliant transmission mechanism. Through the stiffness analysis, the design criteria and optimized design flow of the precision compliant guided micro-drive positioning device are studied. The specific research is as follows: This paper presents the design of a novel flexure-based vertical (or Z-axis) nanopositioning stage driven by a piezoelectric actuator (PZT), which is capable of executing large travel range. The proposed stage consists mainly of a hybrid displacement amplification mechanism (DAM), a motion guiding mechanism, and a decoupling mechanism. The hybrid DAM with amplification ratio of 12.1 is developed to transfer the transverse motion of the PZT actuator into the vertical motion. The motion guiding mechanism is introduced to avoid cross coupling at the output end. The decoupling mechanism can significantly reduce the cross coupling at the driving end to protect the PZT. The stiffness and dynamics of the proposed stage are improved by these mechanisms. Analytical modeling and finite element analysis (FEA) are then adopted to optimize dimensions of the stage. Finally, a prototype of the stage is fabricated and tested for verification. The results of static and dynamic tests show that the proposed stage is capable of vertical travel range of 214 μm with resolution of 8 nm, and the first two resonance frequencies are 205 Hz and 1206 Hz, respectively. Cross coupling tests under various lateral loads (0 g-1000 g) show that the maximum variances of the lateral and angular cross couplings are less than 0.78 μm and 95 μrad, respectively, indicating good decoupling capability. In addition, the low-profile structure of the stage is well suited to be used in limited vertical space. Aiming at the requirement of sub-micro-radial rotary precision positioning, a precision compliant rotary micro-transmission mechanism based on PZT driven was designed. The phased research results of compliant drive characteristics analysis and comprehensive design were summarized. On the basis of theoretical analysis and research, the structural design of the mechanism, the establishment of analysis models of kinematics, statics and dynamics, finite element analysis, and the development of prototypes were completed. The displacement, bandwidth and rotation accuracy of the experiment were studied experimentally. The transmission mechanism ensures that the maximum rotational displacement is 1.64 mrad, the maximum drift of the center of rotation is less than 0.3 μm, the natural frequency is 423 Hz, and the closed-loop rotation resolution is better than 0.2 μrad, which verifies the effectiveness of the configuration design and analysis method. The performance requirements and prototype realization of the transmission characteristics of the single-piezoelectric precision slewing mechanism are completed. The innovative driving method and the design of the compliant mechanism are one of the innovations of this paper. The precision micro-drive positioning device can realize angular motion with sub-microarc metric resolution and high dynamic characteristics. The research on the design and characteristic analysis method of ultra-precision and compliant drive mechanism is an important key technology for the research of this paper. Combining the piezoelectric drive and the stick-slip drive mechanism to realize the large-scale precision positioning technology as the research object, a new large-scale submicro-radius-level rotary positioning platform is designed. The platform can achieve 360° unrestricted rotational positioning while ensuring sub-micro-radiation level positioning accuracy. And a micro-clamp rotary slider with adjustable friction is innovatively proposed, which can actively adjust the friction according to the change of load. The combination of innovative driving methods is one of the innovations of this paper. These aspects of research have important theoretical and practical value for improving the performance and practicability of large-scale submicro-radial-level rotating positioning platform and promoting the development of nano-positioning and nano-operation technology. At the same time, in order to meet the needs of stick-slip drive, the phase lag and oscillation of the periodic sawtooth wave are tracked by the piezoelectric precision microtransmission mechanism. The Bouc-Wen hysteresis model is selected and the nonlinear and linear system identification is obtained by genetic algorithm. The model parameters, combined with the improved zero-phase-difference feedforward compensation controller and the high-bandwidth feedback controller, enable the system to quickly track the input signal and reduce the oscillation of the system, ensuring large-scale submicroradians. The reliability of the prototype of the rotary positioning platform is verified. Keywords: large scale, nanopositioning platform, piezoelectric drive, stick-slip drive, compliant amplification mechanism, rotary precision positioning, Bouc-Wen hysteresis model, high bandwidth feedback control